RMS VISION SYSTEMS      Wafer Substrate Inspection

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RMS Vision Systems Inc.  USA | TEL 805-222-5430

 

 

 

Wafer Substrate Inspection

 

Slip Finder

 

 

The Slip Finder is a fully automatic system capable of detecting crystal dislocations, slip and other defects that occur during many types of wafer processes:

 

APPLICATIONS

  • Epitaxy

  • Oxidation, Diffusion

  • Post Implant Annealing

  • SOI

  • Polishing

  • Strained Silicon

  • Many other Semiconductor Applications

 

SYSTEM SPECIFICATIONS (Summary)

  • Fully Automated Defect Detection

  • Full or Partial Wafer Inspection

  • Adjustable Inspection Recipes

  • Sub-micron Detection Sensitivity

  • Macro optical Field of View: 15mm X 11mm

  • Throughput: Approx 20 – 80 WPH

  • Dual FOUPs; Optional FOSB, Open Cassette

  • Optical Non-Contact Notch Finding

  • Optional class M1 Mini-Environment

  • Windows XP Software Environment

  • SECS-GEM via RS232 or HSMS

  • Full Factory Automation

  • Sorter Capabilities – Optional OCR

  • Non-contact Notch, Flat-Finding and Centering Technology

 

   

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